共 50 条
- [31] Determination of lattice displacements in 2 MeV Se+ implanted GaAs by RBS and PIXE channeling experiments [J]. Nucl Instrum Methods Phys Res Sect B, 1-4 (367-371):
- [32] DEGRADATION OF THE DOPING PROFILE OF EPITAXIAL GAAS-LAYERS DUE TO AN ION-IMPLANTATION PROCESS [J]. ELECTRON DEVICE LETTERS, 1980, 1 (06): : 112 - 114
- [34] Doping of silicon carbide by ion implantation [J]. SILICON CARBIDE AND RELATED MATERIALS, ECSCRM2000, 2001, 353-356 : 549 - 554
- [35] Optical doping of nitrides by ion implantation [J]. MODERN PHYSICS LETTERS B, 2001, 15 (28-29): : 1281 - 1287
- [36] ART OF SEMICONDUCTOR DOPING BY ION IMPLANTATION [J]. SEMICONDUCTOR PRODUCTS AND SOLID STATE TECHNOLOGY, 1966, 9 (09): : 48 - +
- [37] Nitrogen doping of diamond by ion implantation [J]. DIAMOND AND RELATED MATERIALS, 1997, 6 (2-4) : 516 - 520
- [38] Ion-Implantation Doping of Semiconductors [J]. JOURNAL OF MATERIALS SCIENCE, 1967, 2 (06) : 589 - 609
- [39] ION-IMPLANTATION DOPING OF SEMICONDUCTORS [J]. MATERIALS SCIENCE AND TECHNOLOGY, 1988, 4 (06) : 500 - 512