PROPERTIES OF THIN-FILM CAPACITORS MADE WITH REACTIVELY SPUTTERED TA-AL

被引：2

|

作者：

REDDY, PK

BHAGAVAT, GK

JAWALEKAR, SR

机构：

来源：

THIN SOLID FILMS | 1980年 / 72卷 / 03期

关键词：

D O I：

10.1016/0040-6090(80)90528-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：443 / 448

页数：6

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