TA THIN-FILM RESISTORS REACTIVELY SPUTTERED ONTO SUBSTRATES MOUNTED ON A ROTATING CAROUSEL

被引：1

作者：

HARDY, WR ^{[1
]}

TAM, C ^{[1
]}

机构：

[1] MCMASTER UNIV,HAMILTON,ONTARIO,CANADA

来源：

JOURNAL OF MATERIALS SCIENCE | 1974年 / 9卷 / 03期

关键词：

D O I：

10.1007/BF00737845

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：438 / 446

页数：9

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