THIN-FILM OXYGEN SENSORS MADE OF REACTIVELY SPUTTERED ZNO

被引：61

作者：

LAMPE, U ^{[1
]}

MULLER, J ^{[1
]}

机构：

[1] TECH UNIV HAMBURG,DEPT SEMICOND TECHNOL,D-2100 HAMBURG 90,FED REP GER

来源：

SENSORS AND ACTUATORS | 1989年 / 18卷 / 3-4期

关键词：

D O I：

10.1016/0250-6874(89)87034-9

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：269 / 284

页数：16

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[1] PROPERTIES OF THIN-FILM CAPACITORS MADE WITH REACTIVELY SPUTTERED TA-AL
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