THIN-FILM OXYGEN SENSORS MADE OF REACTIVELY SPUTTERED ZNO

被引：61
|
作者：
LAMPE, U [1 ]
MULLER, J [1 ]
机构：
[1] TECH UNIV HAMBURG,DEPT SEMICOND TECHNOL,D-2100 HAMBURG 90,FED REP GER
来源：
SENSORS AND ACTUATORS | 1989年 / 18卷 / 3-4期
关键词：
D O I：
10.1016/0250-6874(89)87034-9
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：269 / 284
页数：16
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