COMPONENT PROPERTIES OF CO-SPUTTERED TA-AL ALLOY FILMS

被引：0
|
作者：
STEIDEL, CA
GERSTENBERG, D
机构：
来源：
PROCEEDINGS ELECTRONIC COMPONENTS CONFERENCE | 1969年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：372 / +
页数：1
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