DIFFUSION AND OXIDATION OF SILICON

被引：0
|
作者：
FAIR, RB [1 ]
机构：
[1] DUKE UNIV, DEPT ELECT ENGN, DURHAM, NC 27706 USA
来源：
ADVANCES IN CHEMISTRY SERIES | 1989年 / 221期
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：265 / 323
页数：59
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