EFFECT OF RADIO-FREQUENCY SPUTTER ION ETCHING AND ION-BEAM ETCHING ON BIOLOGICAL-MATERIAL - SCANNING ELECTRON-MICROSCOPE STUDY

被引：17

|

作者：

HODGES, GM

CARTEAUD, AJ

SELLA, C

MUIR, MD

机构：

来源：

JOURNAL OF MICROSCOPY | 1972年 / 95卷 / JUN期

关键词：

D O I：

10.1111/j.1365-2818.1972.tb01047.x

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

引用

收藏

页码：445 / +

页数：1

相关论文

共 50 条

[21] APPLICATION OF ION-BEAM ETCHING TO SCANNING ELECTRON-MICROSCOPIC OBSERVATION OF THE INTRACELLULAR STRUCTURE
MURANAKA, Y
KANAYA, K
JOURNAL OF ELECTRON MICROSCOPY, 1983, 32 (03): : 275 - 275
[22] DIRECTED ION-BEAM SPUTTER ETCHING OF POLYTETRAFLUOROETHYLENE (TEFLON) USING AN ARGON ION-SOURCE
GARNER, CE
GABRIEL, SB
KUO, YS
THIN SOLID FILMS, 1982, 95 (04) : 351 - 362
[23] CONFINEMENT OF A PULSED ION-BEAM IN A RADIO-FREQUENCY QUADRUPOLE ION TRAP
O, CS
SCHUESSLER, HA
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1981, 26 (04): : 594 - 594
[24] EFFECT OF NEUTRAL ION-BEAM SPUTTERING AND ETCHING ON SILICON
FONASH, SJ
ASHOK, S
SINGH, R
THIN SOLID FILMS, 1982, 90 (03) : 231 - 235
[25] Materials processing using radio-frequency ion-sources: Ion-beam sputter-deposition and surface treatment
Becker, M.
Gies, M.
Polity, A.
Chatterjee, S.
Klar, P. J.
REVIEW OF SCIENTIFIC INSTRUMENTS, 2019, 90 (02):
[26] CRITICAL-POINT DRYING OF SOFT BIOLOGICAL-MATERIAL FOR SCANNING ELECTRON-MICROSCOPE
SMITH, ME
FINKE, EH
INVESTIGATIVE OPHTHALMOLOGY, 1972, 11 (03): : 127 - &
[27] RAMAN-SCATTERING STUDY OF DRY ETCHING OF GAAS - A COMPARISON OF CHEMICALLY ASSISTED ION-BEAM ETCHING AND REACTIVE ION ETCHING
GLEMBOCKI, OJ
DOBISZ, EA
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02): : 1403 - 1407
[28] THE EFFECT OF FLUORINE-ATOMS ON SILICON AND FLUOROCARBON ETCHING IN REACTIVE ION-BEAM ETCHING
CHEEKS, TL
RUOFF, AL
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1917 - 1920
[29] THE EFFECT OF ION-IMPLANTATION ON POLYMER MASK RESISTANCE TO ION-BEAM ETCHING
BORZENKO, TB
VYATKIN, AF
GONCHAKOVA, NN
ZINENKO, VI
KOVAL, YI
KUDRYASHOV, VA
VACUUM, 1988, 38 (11) : 1007 - 1009
[30] MICROSTRUCTURING OF PHOTOMASKS BY A NON-REACTIVE RADIO-FREQUENCY ION ETCHING
SPANGENBERG, B
GORANCHEV, BG
ORLINOV, VI
JELEV, JG
THIN SOLID FILMS, 1982, 87 (04) : 313 - 322

← 1 2 3 4 5 →