DIRECTED ION-BEAM SPUTTER ETCHING OF POLYTETRAFLUOROETHYLENE (TEFLON) USING AN ARGON ION-SOURCE

被引：14
|
作者：
GARNER, CE
GABRIEL, SB
KUO, YS
机构：
来源：
THIN SOLID FILMS | 1982年 / 95卷 / 04期
关键词：
D O I：
10.1016/0040-6090(82)90041-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：351 / 362
页数：12
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