EFFECT OF RADIO-FREQUENCY SPUTTER ION ETCHING AND ION-BEAM ETCHING ON BIOLOGICAL-MATERIAL - SCANNING ELECTRON-MICROSCOPE STUDY

被引:17
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作者
HODGES, GM
CARTEAUD, AJ
SELLA, C
MUIR, MD
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D O I
10.1111/j.1365-2818.1972.tb01047.x
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TH742 [显微镜];
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页码:445 / +
页数:1
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