ANALYTICAL INVESTIGATION OF PLASMA AND ELECTRODE-POTENTIALS IN A DIODE TYPE RF DISCHARGE

被引：7
|
作者：
SUZUKI, K [1 ]
NINOMIYA, K [1 ]
NISHIMATSU, S [1 ]
THOMAN, JW [1 ]
STEINFELD, JI [1 ]
机构：
[1] MIT,DEPT CHEM,CAMBRIDGE,MA 02139
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1986年 / 25卷 / 10期
关键词：
D O I：
10.1143/JJAP.25.1569
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1569 / 1574
页数：6
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