THEORETICAL AND EXPERIMENTAL INVESTIGATION OF THE PLASMA SOURCE WITH ARGON RF BARRIER DISCHARGE AT ATMOSPHERIC PRESSURE

被引：0
|
作者：
Bazhenov, V. Yu. [1 ]
Tsiolko, V. V. [1 ]
Piun, V. M. [1 ]
Chaplinskiy, R. Yu. [2 ]
Kuzmichev, A. I. [2 ]
机构：
[1] Inst Phys NAS Ukraine, Kiev, Ukraine
[2] Natl Tech Univ Ukraine KPI, Kiev, Ukraine
来源：
PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY | 2014年 / 06期
关键词：
D O I：
暂无
中图分类号：
O57 [原子核物理学、高能物理学];
学科分类号：
070202 ;
摘要：
Glow characteristics of capacitive radio frequency discharge with isolated electrodes in atmospheric pressure argon in low-current alpha and high-current gamma modes are determined experimentally and calculated by the hybrid hydrodynamic model. Comparative analysis of obtained experimental data and simulated spatio-temporal distributions of concentrations of discharge plasma electrons and heavy species, mean energy of electrons in the RF barrier discharge enabled interpretation of the discharge structure peculiarities in low-current alpha, alpha-gamma transition and high-current gamma modes.
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页码：137 / 140
页数：4
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