Modeling of the Dielectric Barrier RF Discharge at Atmospheric Pressure

被引：0

作者：

Chaplinskiy, R. U. ^{[1
]}

机构：

[1] NTUU KPI, Fac Elect, Dept Elect Devices, Kiev, Ukraine

来源：

2013 IEEE XXXIII INTERNATIONAL SCIENTIFIC CONFERENCE ELECTRONICS AND NANOTECHNOLOGY (ELNANO) | 2013年

关键词：

dielectric barrier RF discharge; non-thermal plasma; atmospheric pressure;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

one dimensional hybrid modeling of the dielectric barrier radio frequency (DBRF) discharge at atmospheric pressure in argon is performed. Electrons in this model are described in kinetic way and heavy species in hydrodynamic way. Electron density, capacitive power deposition and electrons temperature distributions in the discharge gap for low and high current modes of the DBRF discharge as well as volt-ampere characteristics of DBRF discharge are calculated. The differences between radio-frequency discharge with bare electrodes and DBRF discharge are established.

引用

页码：156 / 159

页数：4

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