A MASS-SPECTROMETRIC INVESTIGATION OF THE PLASMA POLYMERIZATION OF METHYLTRIMETHOXYSILANE IN AN RF DISCHARGE

被引：12

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作者：

HAYS, AK

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来源：

THIN SOLID FILMS | 1981年 / 84卷 / 04期

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D O I：

10.1016/0040-6090(81)90178-4

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T [工业技术];

学科分类号：

08 ;

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页码：401 / 407

页数：7

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