A MASS-SPECTROMETRIC INVESTIGATION OF THE PLASMA POLYMERIZATION OF METHYLTRIMETHOXYSILANE IN AN RF DISCHARGE

被引：12
|
作者：
HAYS, AK
机构：
来源：
THIN SOLID FILMS | 1981年 / 84卷 / 04期
关键词：
D O I：
10.1016/0040-6090(81)90178-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：401 / 407
页数：7
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