SEQUENTIAL DEPOSITION OF YBACUO THIN-FILM ON SAPPHIRE SUBSTRATES

被引：0
|
作者：
HASS, N
DAI, U
DEUTSCHER, G
机构：
[1] Fac. of Exact Sci., Tel Aviv Univ., Ramat Aviv
来源：
SUPERCONDUCTOR SCIENCE & TECHNOLOGY | 1991年 / 4卷
关键词：
D O I：
10.1088/0953-2048/4/1S/073
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Using a sequential deposition method, thin superconducting YBaCuO films were prepared on sapphire substrates. Our technique is based on the oxidation of a pre-deposited Cu film at 400-degrees-C in air, followed by the deposition of a Y2O3 layer and a BaF2 layer. After post annealed at 880-degrees-C, the films are superconducting with an onset temperature of Tc(onset) = 93K and zero resistance at Tc0 = 89K. The films are easily patterned, by applying conventional photolithographic method to the Cu film.
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页码：S262 / S264
页数：3
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