SEQUENTIAL DEPOSITION OF YBACUO THIN-FILM ON SAPPHIRE SUBSTRATES

Using a sequential deposition method, thin superconducting YBaCuO films were prepared on sapphire substrates. Our technique is based on the oxidation of a pre-deposited Cu film at 400-degrees-C in air, followed by the deposition of a Y2O3 layer and a BaF2 layer. After post annealed at 880-degrees-C, the films are superconducting with an onset temperature of Tc(onset) = 93K and zero resistance at Tc0 = 89K. The films are easily patterned, by applying conventional photolithographic method to the Cu film.