ION PROJECTION LITHOGRAPHY FOR SUBMICRON MODIFICATION OF MATERIALS

被引：11
|
作者：
STENGL, G
LOSCHNER, H
WOLF, P
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 19-20卷
关键词：
D O I：
10.1016/S0168-583X(87)80197-0
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
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页码：987 / 994
页数：8
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