PUMPING SPEED OF SPUTTER ION PUMPS

被引：5
|
作者：
AUDI, M
机构：
来源：
VACUUM | 1988年 / 38卷 / 8-10期
关键词：
D O I：
10.1016/0042-207X(88)90439-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：669 / 671
页数：3
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