PUMPING SPEED OF SPUTTER ION PUMPS

被引：5

作者：

AUDI, M

机构：

来源：

关键词：

D O I：

10.1016/0042-207X(88)90439-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：669 / 671

页数：3

共 50 条

[21] PERFORMANCE ASSESSMENT OF SPUTTER ION PUMPS
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