ION-BEAM ETCHING - TECHNIQUES AND DEVICES TO PRODUCE MICROSTRUCTURES

被引：2
|
作者：
BIGL, F
机构：
来源：
ISOTOPENPRAXIS | 1986年 / 22卷 / 12期
关键词：
D O I：
10.1080/10256018608623720
中图分类号：
O61 [无机化学];
学科分类号：
070301 ; 081704 ;
摘要：
引用
收藏
页码：430 / 435
页数：6
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