REMOTE MEASUREMENT OF THIN FILM SHEET RESISTANCE

被引：0
|
作者：
MITCHINSON, JC
PRINGLE, RD
机构：
来源：
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1971年 / 4卷 / NDEC期
关键词：
D O I：
10.1088/0022-3735/4/12/045
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
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页码：1078 / +
页数：1
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