REMOTE MEASUREMENT OF THIN FILM SHEET RESISTANCE

被引：0

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作者：

MITCHINSON, JC

PRINGLE, RD

机构：

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1971年 / 4卷 / NDEC期

关键词：

D O I：

10.1088/0022-3735/4/12/045

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

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页码：1078 / +

页数：1

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