ION-IMPLANTATION OF SULFUR AND SILICON IN GAAS

被引:0
|
作者
LIU, SG
DOUGLAS, EC
WU, CP
MAGEE, CW
NARAYAN, SY
JOLLY, ST
KOLONDRA, F
JAIN, S
机构
来源
RCA REVIEW | 1980年 / 41卷 / 02期
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:227 / 262
页数:36
相关论文
共 50 条
  • [21] ION-IMPLANTATION FOR GAAS LSI FABRICATION
    YAMAZAKI, H
    HYUGA, F
    ISHIDA, S
    [J]. REVIEW OF THE ELECTRICAL COMMUNICATIONS LABORATORIES, 1988, 36 (06): : 531 - 537
  • [22] PROPERTY OF DISORDERED GAAS BY ION-IMPLANTATION
    NOJIMA, S
    KAWASAKI, Y
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (08) : 1455 - 1456
  • [23] DETERMINATION OF SULFUR ION-IMPLANTATION PROFILES IN GAAS USING AUGER-ELECTRON SPECTROSCOPY
    PARK, YS
    GRANT, JT
    HAAS, TW
    [J]. BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1978, 23 (03): : 392 - 392
  • [24] ION-IMPLANTATION IN SILICON FILMS ON SAPPHIRE
    EKLUND, KH
    HOLMEN, G
    PETERSTROM, S
    [J]. APPLIED PHYSICS LETTERS, 1974, 24 (06) : 283 - 284
  • [25] SILICON ON SAPPHIRE FOR ION-IMPLANTATION STUDIES
    GROSS, C
    PISCIOTT.BP
    [J]. SOLID STATE TECHNOLOGY, 1974, 17 (11) : 8 - 8
  • [26] PULSED ION-IMPLANTATION OF SILICON WITH SELENIUM
    SERFOZO, G
    NAUJOKAITIS, R
    KRAFCSIK, I
    DOZSA, L
    BATTISTIG, G
    RIEDL, P
    KLOPFER, E
    GERASIMENKO, NN
    GYULAI, J
    [J]. EPM 87: ENERGY PULSE AND PARTICLE BEAM MODIFICATION OF MATERIALS, 1988, 8 : 74 - 79
  • [27] RECENT DEVELOPMENTS IN ION-IMPLANTATION IN SILICON
    PALS, JA
    BROTHERTON, SD
    VANOMMEN, AH
    POLITIEK, J
    LIGTHART, HJ
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1989, 4 (1-4): : 87 - 94
  • [28] SILICON PRODUCTION APPLICATIONS OF ION-IMPLANTATION
    SMITH, TC
    [J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1979, 26 (01) : 1677 - 1682
  • [29] ON THE MECHANISM OF SILICON AMORPHIZATION BY ION-IMPLANTATION
    YARKULOV, U
    [J]. CRYSTAL LATTICE DEFECTS AND AMORPHOUS MATERIALS, 1987, 13 (3-4): : 305 - 313
  • [30] ION-IMPLANTATION OF IMPURITIES INTO POLYCRYSTALLINE SILICON
    KISIELEWICZ, M
    ZIELINSKASZOT, M
    ZUK, W
    [J]. ACTA PHYSICA POLONICA A, 1979, 56 (05) : 609 - 618