EPITAXIAL OR HIGH-ORIENTED PLATINUM THIN-FILMS GROWN ON VARIOUS SUBSTRATES BY THE RF MAGNETRON SPUTTERING TECHNIQUE

被引:3
|
作者
ZHU, JG [1 ]
XIAO, DQ [1 ]
ZHANG, W [1 ]
ZHU, JM [1 ]
QIAN, ZH [1 ]
机构
[1] ACAD SINICA,INT CTR MAT PHYS,SHENYANG 110015,PEOPLES R CHINA
来源
关键词
D O I
10.1002/pssa.2211390129
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
[No abstract available]
引用
收藏
页码:K17 / K20
页数:4
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