EPITAXIAL OR HIGH-ORIENTED PLATINUM THIN-FILMS GROWN ON VARIOUS SUBSTRATES BY THE RF MAGNETRON SPUTTERING TECHNIQUE

被引：3
|
作者：
ZHU, JG [1 ]
XIAO, DQ [1 ]
ZHANG, W [1 ]
ZHU, JM [1 ]
QIAN, ZH [1 ]
机构：
[1] ACAD SINICA,INT CTR MAT PHYS,SHENYANG 110015,PEOPLES R CHINA
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1993年 / 139卷 / 01期
关键词：
D O I：
10.1002/pssa.2211390129
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：K17 / K20
页数：4
相关论文
共 50 条
  • [31] STUDY ON FERROELECTRIC PLZT THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
    LU, DX
    LI, ZY
    HUANG, LB
    LIN, GQ
    CHINESE SCIENCE BULLETIN, 1994, 39 (18): : 1507 - 1510
  • [32] IN-SITU DEPOSITION OF PZT THIN-FILMS BY RF MAGNETRON SPUTTERING
    ANSARI, PH
    SAFARI, A
    INTEGRATED FERROELECTRICS, 1995, 7 (1-4) : 185 - 193
  • [33] Fractal features of CdTe thin films grown by RF magnetron sputtering
    Hosseinpanahi, Fayegh
    Raoufi, Davood
    Ranjbarghanei, Khadijeh
    Karimi, Bayan
    Babaei, Reza
    Hasani, Ebrahim
    APPLIED SURFACE SCIENCE, 2015, 357 : 1843 - 1848
  • [34] FERROELECTRIC (PB,LA)(ZR,TI)O3 EPITAXIAL THIN-FILMS ON SAPPHIRE GROWN BY RF-PLANAR MAGNETRON SPUTTERING
    ADACHI, H
    MITSUYU, T
    YAMAZAKI, O
    WASA, K
    JOURNAL OF APPLIED PHYSICS, 1986, 60 (02) : 736 - 741
  • [35] Zinc Oxide Thin Films Grown by RF Magnetron Sputtering on Nanostructure Al Thin Layer/Glass and Glass Substrates
    Liu, T. Z.
    Duo, S. W.
    Zhang, H.
    Ran, M. J.
    TESTING AND EVALUATION OF INORGANIC MATERIALS I, 2011, 177 : 398 - 403
  • [36] EPITAXIAL-GROWTH OF BA1-XKXBIO3 THIN-FILMS BY RF-MAGNETRON SPUTTERING
    IYORI, M
    KAMINO, M
    TAKAHASHI, K
    YOSHISATO, Y
    NAKANO, S
    PHYSICA C, 1991, 185 : 1965 - 1966
  • [37] Epitaxial growth of LaFeO3 thin films by RF magnetron sputtering
    Lee, YH
    Wu, JM
    JOURNAL OF CRYSTAL GROWTH, 2004, 263 (1-4) : 436 - 441
  • [38] Epitaxial growth of "infinite layer" thin films and multilayers by rf magnetron sputtering
    Fabrega, L
    Koller, E
    Triscone, JM
    Fischer, O
    JOURNAL OF MATERIALS RESEARCH, 1998, 13 (08) : 2195 - 2201
  • [39] Epitaxial growth of “infinite layer” thin films and multilayers by rf magnetron sputtering
    L. Fàbrega
    E. Koller
    J. M. Triscone
    Ø. Fischer
    Journal of Materials Research, 1998, 13 : 2195 - 2201
  • [40] Optimization of high tunability barium strontium titanate thin films grown by RF magnetron sputtering
    Pervez, NK
    Hansen, PJ
    York, RA
    2004 14th IEEE International Symposium on Applications of Ferroelectrics-ISAF-04, 2004, : 278 - 280
12345