EPITAXIAL OR HIGH-ORIENTED PLATINUM THIN-FILMS GROWN ON VARIOUS SUBSTRATES BY THE RF MAGNETRON SPUTTERING TECHNIQUE

被引：3
|
作者：
ZHU, JG [1 ]
XIAO, DQ [1 ]
ZHANG, W [1 ]
ZHU, JM [1 ]
QIAN, ZH [1 ]
机构：
[1] ACAD SINICA,INT CTR MAT PHYS,SHENYANG 110015,PEOPLES R CHINA
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1993年 / 139卷 / 01期
关键词：
D O I：
10.1002/pssa.2211390129
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：K17 / K20
页数：4
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