RAPID THERMAL-PROCESSING IN SEMICONDUCTOR TECHNOLOGY

被引：23

|

作者：

HART, MJ

EVANS, AGR

机构：

来源：

SEMICONDUCTOR SCIENCE AND TECHNOLOGY | 1988年 / 3卷 / 05期

关键词：

D O I：

10.1088/0268-1242/3/5/001

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：421 / 436

页数：16

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