RAPID THERMAL-PROCESSING IN SEMICONDUCTOR TECHNOLOGY

被引：23
|
作者：
HART, MJ
EVANS, AGR
机构：
来源：
SEMICONDUCTOR SCIENCE AND TECHNOLOGY | 1988年 / 3卷 / 05期
关键词：
D O I：
10.1088/0268-1242/3/5/001
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：421 / 436
页数：16
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