ENERGY DISPERSION OF POSITIVE IONS EFFUSED FROM AN RF PLASMA

被引：56
|
作者：
OKAMOTO, Y
TAMAGAWA, H
机构：
来源：
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN | 1970年 / 29卷 / 01期
关键词：
D O I：
10.1143/JPSJ.29.187
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
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页码：187 / &
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