Positive ions in RF discharge plasma of CF4 gas in a planar diode

被引：0
|
作者：
Ishikawa, I. [1 ]
Sasaki, Sh. [1 ]
Nagaseki, K. [1 ]
Saito, Y. [1 ]
Suganomata, Sh. [1 ]
机构：
[1] Yamanashi Univ, Kofu, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1996年 / 35卷 / 07期
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摘要：
4
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页码：4081 / 4082
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