Electron temperature in RF discharge plasma of CF4/N2 mixture

被引：0
|
作者：
Kobayashi, Hidehiko [1 ]
Ishikawa, Itsuo [1 ]
Suganomata, Shinji [1 ]
机构：
[1] Yamanashi Univ, Kofu, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1994年 / 33卷 / 10期
关键词：
Carbon inorganic compounds - Electric discharges - Electric resistance - Electrodes - Electrons - Nitrogen - Temperature measurement - Thermal effects;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
In 1 MHz discharges of CF4/N2 mixtures at a total pressure of 0.5 Torr, the synergistic variation of the electron temperature was observed with various gas mixing ratios. This variation at CF4 ratio of around 95% is ascribed to the enhancement of electronegativity, and another at CF4 ratio of around 20% is due to the expansion of the discharge region outward from the space between electrodes.
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页码：5979 / 5980
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