ENERGY DISPERSION OF POSITIVE IONS EFFUSED FROM AN RF PLASMA

被引：56

|

作者：

OKAMOTO, Y

TAMAGAWA, H

机构：

来源：

JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN | 1970年 / 29卷 / 01期

关键词：

D O I：

10.1143/JPSJ.29.187

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

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页码：187 / &

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