PRECIPITATES FORMED BY HIGH-CONCENTRATION PHOSPHORUS DIFFUSION IN SILICON

被引：23
|
作者：
JACCODINE, RJ
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1968年 / 39卷 / 07期
关键词：
D O I：
10.1063/1.1656741
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：3105 / +
页数：1
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