Laser-assisted micromachining of large-area 3D metallic microparts

Micromachining of metallic microparts by laser-induced chemical etching in liquids has been investigated using a cw-Nd:YAG laser. The feasibility of this process for a direct microstructuring of metals with defined structure shape was demonstrated. The direct processing of the workpiece resulted in a microstructuring with high precision and lateral resolution and without debris. In addition, for large-area micromachining of metals, an ablative microstructuring of polymer substrates in a specially developed scanning optical projection scheme was performed. Afterwards, the as microstructured polymer substrate can be converted into a negativ metallic form by electroplating.