Investigation of femtosecond laser-assisted micromachining of lithium niobate

被引：13
|
作者：
Malshe, A [1 ]
Deshpande, D
Stach, E
Rajurkar, K
Alexander, D
机构：
[1] Univ Arkansas, Dept Engn Mech, Fayetteville, AR USA
[2] Lawrence Berkeley Lab, Natl Ctr Electron Microscopy, Berkeley, CA USA
[3] Univ Nebraska, Dept Ind & Management Syst Engn, Lincoln, NE USA
[4] Univ Nebraska, Dept Elect Engn, Lincoln, NE USA
来源：
CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2004年 / 53卷 / 01期
基金：
美国国家科学基金会;
关键词：
laser micro machining; single crystal; surface;
D O I：
10.1016/S0007-8506(07)60675-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Lithium Niobate has a potential for applications in electronics and communication industries due to its unique electro-optical, piezoelectric and nonlinear properties. Femtosecond laser machining offers the best alternative to machine the mechanically fragile and optically delicate lithium niobate crystal. This paper reports a study of the effect of femtosecond laser machining on the surface integrity of lithium niobate. The transmission electron microscopy reveals a 100nm thin amorphous region and a void. The chemical analysis shows a loss of lithium and oxygen from the surface and sub-surface. Optical illumination facilitates the selective readout of the written spots of 2 microns size.
引用
收藏
页码：187 / 190
页数：4
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