Fabrication of a multifunctional photonic integrated chip on lithium niobate on insulator using femtosecond laser-assisted chemomechanical polish

被引：45

作者：

Wu, Rongbo ^{[1
,2
]}

Lin, Jintian ^{[1
]}

Wang, Min ^{[3
,4
]}

Fang, Zhiwei ^{[3
,4
]}

Chu, Wei ^{[1
]}

Zhang, Jianhao ^{[1
,2
]}

Zhou, Junxia ^{[3
,4
]}

Cheng, Ya ^{[1
,2
,3
,5
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China

[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

[3] East China Normal Univ, State Key Lab Precis Spect, Shanghai 200062, Peoples R China

[4] East China Normal Univ, Sch Phys & Mat Sci, XXL Extreme Optoelectromech Lab, Shanghai 200241, Peoples R China

[5] Shanxi Univ, Collaborat Innovat Ctr Extreme Opt, Taiyuan 030006, Shanxi, Peoples R China

来源：

OPTICS LETTERS | 2019年 / 44卷 / 19期

基金：

中国国家自然科学基金;

关键词：

GENERATION; RESONATORS;

D O I：

10.1364/OL.44.004698

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report fabrication of a multifunctional photonic integrated chip on lithium niobate on insulator, which is achieved by femtosecond laser-assisted chemomechanical polish. We demonstrate a high-extinction-ratio beam splitter, a 1 x 6 optical switch, and a balanced 3 x 3 interferometer on the fabricated chip by reconfiguring the microelectrode array integrated with the multifunctional photonic circuit. (C) 2019 Optical Society of America

引用

页码：4698 / 4701

页数：4

共 27 条

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