DIFFUSION OF NICKEL IMPURITY IN SILICON THROUGH AN OXIDE LAYER

被引：0
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作者：
TALIPOV, FM
BAKHADYRKHANOV, MK
SOLTAMOV, UB
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来源：
INORGANIC MATERIALS | 1989年 / 25卷 / 06期
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T [工业技术];
学科分类号：
08 ;
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页码：872 / 873
页数：2
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