DIFFUSION OF NICKEL IMPURITY IN SILICON THROUGH AN OXIDE LAYER

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作者：

TALIPOV, FM

BAKHADYRKHANOV, MK

SOLTAMOV, UB

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来源：

INORGANIC MATERIALS | 1989年 / 25卷 / 06期

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中图分类号：

T [工业技术];

学科分类号：

08 ;

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页码：872 / 873

页数：2

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