DIFFUSION OF GROUP-V IMPURITY IN SILICON

被引：40

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作者：

YOSHIDA, M

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1971年 / 10卷 / 06期

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D O I：

10.1143/JJAP.10.702

中图分类号：

O59 [应用物理学];

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页码：702 / &

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