CHARACTERIZATION OF ALXGA1-XAS-GAAS LAYER STRUCTURES BY SCANNING AUGER-ELECTRON MICROSCOPY

被引：10
|
作者：
VANOOSTROM, A
AUGUSTUS, L
NIJMAN, W
LESWIN, W
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 01期
关键词：
D O I：
10.1116/1.570468
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：40 / 43
页数：4
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