SCANNING AUGER-ELECTRON MICROSCOPY AT 30 NM RESOLUTION

被引：47

作者：

VENABLES, JA ^{[1
]}

JANSSEN, AP ^{[1
]}

HARLAND, CJ ^{[1
]}

JOYCE, BA ^{[1
]}

机构：

[1] UNIV SUSSEX,SCH MATH & PHYS SCI,BRIGHTON BN1 9QH,SUSSEX,ENGLAND

来源：

PHILOSOPHICAL MAGAZINE | 1976年 / 34卷 / 03期

关键词：

D O I：

10.1080/14786437608222040

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：495 / 500

页数：6

共 50 条

[1] NANOMETER-RESOLUTION SCANNING AUGER-ELECTRON MICROSCOPY
HEMBREE, GG
VENABLES, JA
[J]. ULTRAMICROSCOPY, 1992, 47 (1-3) : 109 - 120
[2] SCANNING AUGER-ELECTRON MICROSCOPY
BROWNING, R
PRUTTON, M
[J]. PHYSICS IN TECHNOLOGY, 1979, 10 (06): : 259 - 265
[3] PROBLEMS OF SCANNING AUGER-ELECTRON MICROSCOPY
FRANK, L
[J]. VACUUM, 1991, 42 (1-2) : 147 - 150
[4] EDGE EFFECT IN HIGH-RESOLUTION SCANNING AUGER-ELECTRON MICROSCOPY
SHIMIZU, R
EVERHART, TE
MACDONALD, NC
HOVLAND, CT
[J]. APPLIED PHYSICS LETTERS, 1978, 33 (06) : 549 - 551
[5] SYNCHRONOUS MODULATION IN SCANNING AUGER-ELECTRON MICROSCOPY
GOTO, K
ICHIMURA, S
SHIMIZU, R
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1979, 50 (01): : 46 - 47
[6] DIGITAL INTEGRATOR IN SCANNING AUGER-ELECTRON MICROSCOPY
GOTO, K
ICHIMURA, S
SHIMIZU, R
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1980, 51 (01): : 95 - 97
[7] MATHEMATICAL AND PHYSICAL CONSIDERATIONS ON THE SPATIAL-RESOLUTION IN SCANNING AUGER-ELECTRON MICROSCOPY
CAZAUX, J
[J]. SURFACE SCIENCE, 1983, 125 (02) : 335 - 354
[8] SCANNING AUGER-ELECTRON MICROSCOPY WITH HIGH SPATIAL OR HIGH-ENERGY RESOLUTION
PRUTTON, M
BROWNING, R
ELGOMATI, MM
PEACOCK, D
[J]. VACUUM, 1982, 32 (06) : 351 - 357
[9] COMBINED AUGER-ELECTRON SPECTROSCOPY AND SCANNING ELECTRON-MICROSCOPY
ASHWELL, GWB
TODD, CJ
HECKINGBOTTOM, R
[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1973, 6 (05): : 435 - 438
[10] SOME STRATEGIES FOR QUANTITATIVE SCANNING AUGER-ELECTRON MICROSCOPY
BROWNING, R
PEACOCK, DC
PRUTTON, M
[J]. APPLICATIONS OF SURFACE SCIENCE, 1985, 22-3 (MAY): : 145 - 159

← 1 2 3 4 5 →