OPTIMIZATION OF THE RING SCINTILLATION DETECTOR FOR BACKSCATTERED ELECTRONS IN THE SCANNING ELECTRON-MICROSCOPE

被引：0

作者：

HEJNA, J

机构：

来源：

INSTITUTE OF PHYSICS CONFERENCE SERIES | 1988年 / 93期

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D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

A topographic contrast obtained with the ring detector was studied experimentally. At high magnifications a narrow range of low take-off angles should be used. At low magnifications not a full ring but a sector covering about 270-degrees is more sensitive to a surface tilt.

引用

页码：119 / 120

页数：2

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