OPTIMIZATION OF THE RING SCINTILLATION DETECTOR FOR BACKSCATTERED ELECTRONS IN THE SCANNING ELECTRON-MICROSCOPE

被引：0
|
作者：
HEJNA, J
机构：
来源：
INSTITUTE OF PHYSICS CONFERENCE SERIES | 1988年 / 93期
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D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
A topographic contrast obtained with the ring detector was studied experimentally. At high magnifications a narrow range of low take-off angles should be used. At low magnifications not a full ring but a sector covering about 270-degrees is more sensitive to a surface tilt.
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页码：119 / 120
页数：2
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