GROWTH OF 4-INCH DIAMETER SEMI-INSULATING LEC GAAS WITH APPLIED MAGNETIC-FIELD

被引:0
|
作者
OZAWA, S
NAKAYAMA, H
SHIINA, Y
OHASHI, E
KIKUTA, T
机构
关键词
D O I
暂无
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
4inch diameter 25cm long semi-insulating GaAs crystals have been grown from 8 to 13kg melts using 6 to 8inch diameter pBN crucibles. The growth stability is much improved by the application of an axial magnetic field of 3kGauss. The stress distribution calculated using actual geometry at each growth stage was in good agreement with dislocation distributions measured 20 approximately 25mm from the growth interface.
引用
收藏
页码:343 / 346
页数:4
相关论文
共 50 条
  • [21] Semi-insulating LEC GaAs substrates with an improved macroscopic and mesoscopic homogeneity
    Jurisch, M
    Flade, T
    Hoffmann, B
    Kohler, A
    Korb, J
    Kretzer, U
    Reinhold, T
    Weinert, B
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1997, 44 (1-3): : 198 - 202
  • [22] LATTICE BENDING IN LEC-GROWN SEMI-INSULATING GAAS WAFERS
    YASUAMI, S
    MIKAMI, H
    HOJO, A
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1983, 22 (10): : 1567 - 1569
  • [23] VERTICAL GRADIENT FREEZE GROWTH OF 75 MM DIAMETER SEMI-INSULATING GAAS
    CLEMANS, JE
    CONWAY, JH
    SEMI-INSULATING III-V MATERIALS, MALMO 1988, 1988, : 423 - 428
  • [24] ELECTRICAL HOMOGENEITY OF SEMI-INSULATING LEC GAAS IMPROVED BY POSTGROWTH ANNEALING
    MENNIGER, H
    BEER, M
    GLEICHMANN, R
    RAIDT, H
    ULRICI, B
    VOIGT, G
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1990, 121 (01): : 95 - 103
  • [25] EFFECTS OF THERMAL HISTORY DURING LEC GROWTH ON BEHAVIOR OF EXCESS ARSENIC IN SEMI-INSULATING GAAS
    INADA, T
    OTOKI, Y
    OHATA, K
    TAHARASAKO, S
    KUMA, S
    JOURNAL OF CRYSTAL GROWTH, 1989, 96 (02) : 327 - 332
  • [26] A NEW MAGNETIC-FIELD APPLIED PULLING APPARATUS FOR LEC GAAS SINGLE-CRYSTAL GROWTH
    TERASHIMA, K
    FUKUDA, T
    JOURNAL OF CRYSTAL GROWTH, 1983, 63 (02) : 423 - 425
  • [27] GROWTH AND PROPERTIES OF SEMI-INSULATING EPITAXIAL GAAS
    MATTES, BL
    HOUNG, YM
    PEARSON, GL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (04): : 869 - 875
  • [28] VERTICAL MAGNETIC FIELD APPLIED LEC APPARATUS FOR LARGE DIAMETER GaAs SINGLE CRYSTAL GROWTH.
    Terashima, Kazutaka
    Katsumata, Tooru
    Orito, Fumio
    Fukuda, Tsuguo
    1600, (23):
  • [29] Photo-induced current spectroscopy study on semi-insulating LEC GaAs
    Seghier, D
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1996, 29 (04) : 1071 - 1073
  • [30] SEM-EBIC INVESTIGATIONS OF SEMI-INSULATING UNDOPED LEC-GAAS
    TOKUMARU, Y
    OKADA, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (05): : L364 - L366