RAPID E-BEAM HEATING FOR STUDYING METASTABLE TRANSITIONS IN MN

被引:0
|
作者
KNAPP, JA
FOLLSTAEDT, DM
机构
关键词
D O I
10.1557/JMR.1989.1393
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:1393 / 1397
页数:5
相关论文
共 50 条
  • [1] RAPID ISOTHERMAL HEATING OF VLSI MOS DEVICES USING A SCANNING E-BEAM SOURCE
    RENSCH, DB
    CHEN, JY
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (08) : C325 - C326
  • [2] E-BEAM HEATING OF A MIRROR CONFINED PLASMA AS A FUNCTION OF DIODE GEOMETRY
    ROBERTSON, S
    FISHER, A
    ROBERSON, C
    [J]. BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1977, 22 (09): : 1086 - 1086
  • [3] Heating of X-ray masks during e-beam writing
    Krasnoperov, N
    Bansel, J
    Vladimirsky, O
    Wallace, J
    Vladimirsky, Y
    Cerrina, F
    [J]. EMERGING LITHOGRAPHIC TECHNOLOGIES III, PTS 1 AND 2, 1999, 3676 : 106 - 116
  • [4] E-beam technology
    Knowles, G
    [J]. PHOTONICS SPECTRA, 2000, 34 (10) : 12 - 13
  • [5] Analysis of e-beam impact on the resist stack in e-beam lithography process
    Indykiewicz, K.
    Paszkiewicz, B.
    [J]. ELECTRON TECHNOLOGY CONFERENCE 2013, 2013, 8902
  • [6] E-BEAM SYSTEM METROLOGY
    SILLS, RM
    STANDIFORD, KP
    [J]. SOLID STATE TECHNOLOGY, 1983, 26 (09) : 191 - 196
  • [7] Illuminating E-Beam Processing
    McHugh, Tara
    Carswell, Lindsay
    [J]. FOOD TECHNOLOGY, 2017, 71 (01) : 64 - 66
  • [8] E-BEAM FUSION DIAGNOSTICS
    TOEPFER, AJ
    [J]. LASER FOCUS WITH FIBEROPTIC TECHNOLOGY, 1979, 15 (01): : 8 - 8
  • [9] SUBMICRON E-BEAM TESTING
    WOLFGANG, E
    GORLICH, S
    KOLZER, J
    [J]. INSTITUTE OF PHYSICS CONFERENCE SERIES, 1989, (100): : 689 - 696
  • [10] HYDRA E-BEAM MACHINE
    MARTIN, TH
    [J]. BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1973, 18 (02): : 194 - 194