SPUTTERING DEPOSITION, XPS AND X-RAY-DIFFRACTION CHARACTERIZATION OF HARD NITROGEN-PLATINUM THIN-FILMS

被引：11
|
作者：
HECQ, A [1 ]
DELRUE, JP [1 ]
HECQ, M [1 ]
ROBERT, T [1 ]
机构：
[1] UNIV ETAT MONS,FAC MED,CHIM GEN LAB,B-7000 MONS,BELGIUM
来源：
JOURNAL OF MATERIALS SCIENCE | 1981年 / 16卷 / 02期
关键词：
D O I：
10.1007/BF00738630
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：407 / 412
页数：6
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