SPUTTERING DEPOSITION, XPS AND X-RAY-DIFFRACTION CHARACTERIZATION OF HARD NITROGEN-PLATINUM THIN-FILMS

被引：11

作者：

HECQ, A ^{[1
]}

DELRUE, JP ^{[1
]}

HECQ, M ^{[1
]}

ROBERT, T ^{[1
]}

机构：

[1] UNIV ETAT MONS,FAC MED,CHIM GEN LAB,B-7000 MONS,BELGIUM

来源：

JOURNAL OF MATERIALS SCIENCE | 1981年 / 16卷 / 02期

关键词：

D O I：

10.1007/BF00738630

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：407 / 412

页数：6

共 50 条

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