CHARACTERIZATION OF RF SPUTTERED ZNS AND ZNO THIN-FILMS FOR SAW TRANSDUCERS BY X-RAY-DIFFRACTION ANALYSIS

被引：0
|
作者：
SCHOENWALD, JS [1 ]
KEESTER, KL [1 ]
STAPLES, EJ [1 ]
机构：
[1] ROCKWELL INT,ELECTR RES CTR,THOUSAND OAKS,CA 91360
来源：
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS | 1980年 / 27卷 / 03期
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D O I：
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中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
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页码：156 / 156
页数：1
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