SELECTION OF METHOD FOR ESTIMATING THE INHOMOGENEITY OF LARGE-DIAMETER INDUSTRIAL SILICON-CRYSTALS

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作者：

YUROVA, ES

SHVEDOVA, OI

KANEVSKAYA, VM

TARASOV, VK

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来源：

INDUSTRIAL LABORATORY | 1990年 / 56卷 / 10期

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中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

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页码：1192 / 1194

页数：3

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